Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
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چکیده
منابع مشابه
Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consi...
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ژورنال
عنوان ژورنال: Sensors
سال: 2009
ISSN: 1424-8220
DOI: 10.3390/s91210158